Micro-Opto-Electro-Mechanical Systems (MOEMS) and Hybrid Photonics Systems
Lithium niobate nanostructured EO membrane_CNRS-FEMTO-ST


Hosts commercial and in-house developed software tools for the modelling, design and simulations of MEMS fabrication, numerical analysis and design of microoptical components and systems. This includes scalar and rigorous methods of numerical simulations and extended study of hybrid systems, thin-films-based components and refractive and diffractive micro-optical structures through different modelling methods.

Optofluidc chip in glass_LioniX


Facilities for the fabrication of silicon and glass MEMS/MOEMS, a 850-m² class 10/1000 clean room with mask and wafer processing equipment, nano and microfabrication facilities and metrology instruments. As well as microfluidic, electro-optical and nonlinear hybrid photonic components and systems and thin-film-based micro and nanostructures. This includes machining/processing capabilities on oxides (TiO2, SiO2, BSO…), ferroelectric and nonlinear materials such as lithium niobate, lithium tantalate, KTP, or D-KDP.

Microarray plasmonics IPHT Sven_Doering_Leibniz-IPHT


Hosts precision instrumentation for the measurement and static as well dynamic characterization of Hybrid photonic systems including MEMS, MOEMS and VCSELS . This includes instrumentation for topography, vibration parameters, and wavefront quality measurements like laser two beam and shearing interferometers, white light interferometer, OCT, holographic microscopes, Shack-Hartmann sensor, high resolution spectrum analyser, vectorial network analyser as well as AFM and electron microscopes supported by full path of data processing and required features determination. The possible solutions for on-wafer MEMS/MOEMS, multifunctional testing and pigtailing for mass production. Reliability tests methodology and demonstrators for MEMS/MOEMS elements and fibered photonic systems.

High Power Laser Package Assembly_CSEM


Hosts technologies for the heterogeneous and hybrid 3D integration and packaging of MOEMS and other photonic systems and assemblies, including lithium-niobate-based components and circuits. This includes numerous wafer-bonding technologies and access to the robotic station for MOEMS assembly, access to dynamic nanostructuring, and to automatic pigtailing capabilities.

Miniature atomic clock featuring a diffractive light guide to interrogate hot rubidium vapor inside a MEMS cell_CSEM


Facilities to implement and test the functional demonstrators and evaluation of their performances in a laboratory environment. This includes well equipped optical laboratories. Integral part of functional tests is use of reference elements or calibration bodies to prove demonstrators´ quality. In the laboratory the statistical analysis and basic reliability studies of demonstrators can be realized.